Essay About Crab Leg Spring And Number Of Finger Pairs

Comb Drive Uses in Blood Pressure
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/prep7
/title Comb drive resonator with FLUID139 Couette damping
! DRIVE COMB
! |
! |
! CRAB LEG SPRING — CENTRAL MASS — CRAB LEG SPRING
! |
! |
! PICK-UP COMB
! Reference:
! “Microelectromechanical Filters for Signal Processing”,
! Lin, L., Howe, R.T., J. Microelectromechanical Systems,
! VOL 7, No. 3, Sept 1998
! beam parameters (uMKS units)
E = 190e3 !Young modulus
d = 2.33e-15 ! density
hb = 2 ! beam thickness
wb = 2 ! beam width
Lb = 100 ! beam length
k = 5.699 ! mechanical stiffness
! comb parameter
n= 9 ! number of finger
np=n*2
! number of finger pairs
x0= 10 ! initial finger overlap
L0= 26 ! finger length (stator comb)
L=20 ! finger length (moving comb)
gi= L0-x0 ! initial gap
w= 4 ! finger width
h= hb ! finger thickness
gp=3 ! finger gap (lateral)
g= 3 ! comb gap (vertical)
Mr = 1.96563e-11 ! mass
! Lateral gap area
areal=np*h*x0
! Vertical gap area
areav=n*w*x0
! Stroke vs. Capacitance data
x1 = 14
cx1 = 0.97857e-2
x2 = 15
cx2 = 0.96669e-2
x3 = 16
cx3 = 0.95445e-2
x4 = 17
cx4 = 0.94185e-2
x5 = 18
cx5 = 0.93384e-2
! Voltage conditions
Vi = 40 ! input dc bias
Vo = 60 ! output dc bias
Vac = 10 ! input ac bias
! Damping parmeters
nu=18.3e-12
! dynamic viscosity
po=0.1
! reference pressure
dens=1.17e-18 ! density
fc=nu/(2*3.14159*dens*(g**2)) ! cutoff frequency
daduv=w*n